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Michael A. Lieberman received his B.S. and M.S. degrees from the Massachusetts Institute of Technology in 1962 and his Ph.D. degree from Massachusetts Institute of Technology in 1966. He joined the Department of Electrical Engineering and Computer Sciences (EECS) at Berkeley in 1966.
Michael Lieberman received his B.S. and M.S. degrees from the Massachusetts Institute of Technology in 1962 and his Ph.D. degree from MIT in 1966. He joined the Department of Electrical Engineering and Computer Sciences at UC Berkeley in 1966.
Standing wave and skin effects in large-area, high-frequency capacitive discharges. MA Lieberman, JP Booth, P Chabert, JM Rax, MM Turner. Plasma Sources Science and Technology 11 (3), 283. , 2002.
Michael A. Lieberman Department of Electrical Engineering and Computer Sciences University of California, Berkeley. Publications by M.A. Lieberman (in refereed journals) ``Plasma Density Measurement by Cavity Perturbation in High Density Plasma,'' (with A. J. Lichtenberg), Phys. Fluids, 12, 1969.
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Jan 27, 2005 · MICHAEL A. LIEBERMAN, PhD, is Professor in the Graduate School in Electrical Engineering at the University of California, Berkeley. He has published more than 170 journal articles on the topics of plasmas, plasma processing, and nonlinear dynamics.
Michael A. Lieberman (Life Fellow, IEEE) received the B.S., M.S., and Ph.D. degrees from the Massachusetts Institute of Technology, Cambridge, MA, USA, in 1962, 1962, and 1966, respectively. He joined the Department of Electrical Engineering and Computer Sciences (EECS) at Berkeley, Berkeley, CA, USA, in 1966.
